Tetraethyl orthosilicate

packaged for use in deposition systems

Orthosilicic acid tetraethyl ester, Tetraethyl orthosilicate, Silicon tetraethoxide, Tetraethyl silicate, TEOS, Tetraethoxysilane, Tetraethoxysilicon(IV)
Linear Formula:
CAS Number:
Molecular Weight:
Beilstein/REAXYS Number:
EC Number:
MDL number:
PubChem Substance ID:

vapor density

7.2 (vs air)

Quality Level

vapor pressure

<1 mmHg ( 20 °C)


≥99.5% (GC)



refractive index

n20/D 1.382 (lit.)


168 °C (lit.)


0.933 g/mL at 20 °C (lit.)

SMILES string




InChI key


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Tetraethyl orthosilicate (TEOS) is an oxygen containing precursor of Si used for the deposition of:
  • Si oxide
  • Oxycarbide
  • Doped silicate
  • Silanol
  • Siloxane polymer
  • Organosilicon thin films

The films can be deposited at low temperatues (<250 °C). TEOS is also used to deposit mesoporous and nanoporous thin films of silica. These porous films can be doped during deposition to further enhance their properties.
Commonly used as a precursor to prepare xerogel
Will interact with dodecylamine in the formation of intercalation compounds of H+-magadiite and used in a study of mixed-metal bioactive glasses.


25 mL in stainless steel cylinder


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Signal Word


Hazard Statements

Target Organs

Respiratory system


UN1292 - class 3 - PG 3 - Tetraethyl silicate

WGK Germany


Flash Point(F)

113.0 °F - closed cup

Flash Point(C)

45 °C - closed cup

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Andreas Kay et al.
Journal of the American Chemical Society, 128(49), 15714-15721 (2006-12-07)
Thin films of silicon-doped Fe2O3 were deposited by APCVD (atmospheric pressure chemical vapor deposition) from Fe(CO)5 and TEOS (tetraethoxysilane) on SnO2-coated glass at 415 degrees C. HRSEM reveals a highly developed dendritic nanostructure of 500 nm thickness having a feature...
Nils R Blumenthal et al.
Proceedings of the National Academy of Sciences of the United States of America, 111(45), 16124-16129 (2014-10-29)
Extracellular soluble signals are known to play a critical role in maintaining neuronal function and homeostasis in the CNS. However, the CNS is also composed of extracellular matrix macromolecules and glia support cells, and the contribution of the physical attributes...
Seong Cheol Hong et al.
International journal of nanomedicine, 6, 3219-3231 (2012-01-13)
Superparamagnetic iron oxide nanoparticles (SPIONs) have been widely utilized for the diagnosis and therapy of specific diseases, as magnetic resonance imaging (MRI) contrast agents and drug-delivery carriers, due to their easy transportation to targeted areas by an external magnetic field....
Lin Lin et al.
Colloids and surfaces. B, Biointerfaces, 101, 97-100 (2012-07-17)
Hollow silica spheres with round mesoporous shells were synthesized by core-shell template method, using monodispersed cationic polystyrene particles as core, and TEOS (tetraethoxysilane) as the silica source to form shell. After calcination at 550°C, uniform spheres with a thin shell...
Evan M Hetrick et al.
Biomaterials, 30(14), 2782-2789 (2009-02-24)
The ability of nitric oxide (NO)-releasing silica nanoparticles to kill biofilm-based microbial cells is reported. Biofilms of Pseudomonas aeruginosa, Escherichia coli, Staphylococcus aureus, Staphylococcus epidermidis, and Candida albicans were formed in vitro and exposed to NO-releasing silica nanoparticles. Replicative viability...

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