725471

Bis(methyl-η⁵−cyclopentadienyl)methoxymethylzirconium

packaged for use in deposition systems

• Sinônimo(s): ZRCMMM, ZrD-CO₄
• Fórmula linear: Zr(CH₃C₅H₄)₂CH₃OCH₃
• Peso molecular: 295.53
• Número MDL: MFCD16875687
• Código UNSPSC: 12352103
• ID de substância PubChem: 329764163
• NACRES: NA.23

Propriedades

• Formulário: liquid
• adequação da reação: core: zirconium
• cor: colorless
• p.e.: 110 °C/0.5 mmHg (lit.)
• densidade: 1.27 g/mL±0.01 g/mL at 25 °C (lit.)
• cadeia de caracteres SMILES: C[C]1[C][C][C][C]1.C[C]2[C][C][C][C]2.C[Zr]OC
• InChI: 1S/2C6H7.CH3O.CH3.Zr/c2*1-6-4-2-3-5-6;1-2;;/h2*2-5H,1H3;1H3;1H3;/q;;-1;;+1
• chave InChI: LFGIFPGCOXPKMG-UHFFFAOYSA-N

Descrição

Descrição geral

Atomic number of base material: 40 Zirconium

Aplicação

Precursors Packaged for Depositions Systems

Advanced precursor for atomic layer deposition of ZrO₂ thin films. Hafnium and zirconium oxides are leading candidates to replace silicion dioxide as the gate oxide in a variety of semiconductor and energy applications. Excellent properties of HfO₂ and ZrO₂ films make them especially attractive for gate oxide replacement and as potential insulating dielectrics for capacitive elements in memory devices such as DRAM.

Características e benefícios

Compatible with a variety of oxidants in ALD growth processes across a wide temperature range exhibiting self limiting growth up to 400 °C. Precursor volatility and thermal stability properties enable easy materials transport from bubblers into conventional deposition tools.

Embalagem

Packaged in stainless steel cylinders compatible with conventional deposition systems. Precursors may be used in liquid injection systems as dilute solutions and in combination with a variety of other sources to deposit mixed oxides.

Informações de segurança

• Pictogramas: GHS07
• Palavra indicadora: Warning
• Frases de perigo: H302,H315,H319
• Declarações de precaução: P305 + P351 + P338
• Classificações de perigo: Acute Tox. 4 Oral - Eye Irrit. 2 - Skin Irrit. 2
• Código de classe de armazenamento: 10 - Combustible liquids not in Storage Class 3
• Classe de risco de água (WGK): WGK 3
• Ponto de fulgor (°F): 226.4 °F
• Ponto de fulgor (°C): 108 °C