651834

Nichrome etchant

standard

• MDL番号: MFCD07370976
• UNSPSCコード: 12161700
• NACRES: NA.23

特性

• グレード: standard
• 組成: volatiles, 85%
• 色: clear yellow-orange
• bp: 100 °C/1 atm
• 密度: 1.16 g/mL at 25 °C

詳細

詳細

Nichrome etchant is a high purity etching system that is a mixture of ceric ammonium nitrate and nitric acid. It can be used to etch the nickel and chromium alloy.

アプリケーション

硝酸セリウムアンモニウムベースのエッチング液。Al、Cr、Cu、Ni、GaAsをエッチングします。表面はSi、Ta/TaNを酸化します。40°Cでのエッチング速度は50 Å/秒です。必要な脱イオン水ですすぐだけできれいにエッチングします。

Nichrome etchant is used in the fabrication of microheater patterns of polydimethyl siloxane (PDMS), silica (SiO₂) and glass substrates, which can be further used in the fabrication of flow sensors. It may also be used to etch out nickel (Ni) from the electroplated Ni on amorphous silica wafers.

For use at room temperature or elevated temperature. Etches cleanly, eliminating need for an intermediate rinse.

特徴および利点

Designed for etching nichrome thin films used in microelectronic applications. Compatible with both positive and negative photoresists and provides fine-line control with minimal undercutting. Filtered to 0.2 micron to remove particlulates and composed of semiconductor grade materials.

安全性情報

• ピクトグラム: GHS03,GHS05,GHS07,GHS09
• シグナルワード: Danger
• 危険有害性情報: H272,H290,H314,H317,H411
• 注意書き: P210 - P220 - P273 - P280 - P303 + P361 + P353 - P305 + P351 + P338
• 危険有害性の分類: Aquatic Chronic 2 - Eye Dam. 1 - Met. Corr. 1 - Ox. Liq. 2 - Skin Corr. 1B - Skin Sens. 1
• 補足的ハザード: EUH071
• 保管分類コード: 5.1B - Oxidizing hazardous materials
• WGK: WGK 3
• 引火点(°F): Not applicable
• 引火点(℃): Not applicable