553468
99.999%
solid
205-210 °C (lit.)
63-65 °C (lit.)
CC(C)(C)O[Si](O)(OC(C)(C)C)OC(C)(C)C
1S/C12H28O4Si/c1-10(2,3)14-17(13,15-11(4,5)6)16-12(7,8)9/h13H,1-9H3
HLDBBQREZCVBMA-UHFFFAOYSA-N
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13 - Non Combustible Solids
WGK 3
Not applicable
Not applicable
dust mask type N95 (US), Eyeshields, Gloves
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atomic layer deposition (ALD), microelectronics, Mo:Al2O3 films, nanocomposite coating, photovoltaics, semiconductor devices, W:Al2O3 films, composite films, layer-by-layer
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