725471

Bis(methyl-η⁵−cyclopentadienyl)methoxymethylzirconium

packaged for use in deposition systems

• Synonym(e): ZRCMMM, ZrD-CO₄
• Lineare Formel: Zr(CH₃C₅H₄)₂CH₃OCH₃
• Molekulargewicht: 295.53
• MDL-Nummer: MFCD16875687
• UNSPSC-Code: 12352103
• PubChem Substanz-ID: 329764163
• NACRES: NA.23

Eigenschaften

• Form: liquid
• Eignung der Reaktion: core: zirconium
• Farbe: colorless
• bp: 110 °C/0.5 mmHg (lit.)
• Dichte: 1.27 g/mL±0.01 g/mL at 25 °C (lit.)
• SMILES String: C[C]1[C][C][C][C]1.C[C]2[C][C][C][C]2.C[Zr]OC
• InChI: 1S/2C6H7.CH3O.CH3.Zr/c2*1-6-4-2-3-5-6;1-2;;/h2*2-5H,1H3;1H3;1H3;/q;;-1;;+1
• InChIKey: LFGIFPGCOXPKMG-UHFFFAOYSA-N

Beschreibung

Allgemeine Beschreibung

Atomic number of base material: 40 Zirconium

Anwendung

Atomic number of base material: 40 Zirconium

Precursors Packaged for Depositions Systems

Leistungsmerkmale und Vorteile

Compatible with a variety of oxidants in ALD growth processes across a wide temperature range exhibiting self limiting growth up to 400 °C. Precursor volatility and thermal stability properties enable easy materials transport from bubblers into conventional deposition tools.

Verpackung

Packaged in stainless steel cylinders compatible with conventional deposition systems. Precursors may be used in liquid injection systems as dilute solutions and in combination with a variety of other sources to deposit mixed oxides.

Sicherheitshinweise

• Piktogramme: GHS07
• Signalwort: Warning
• H-Sätze: H302,H315,H319
• P-Sätze: P305 + P351 + P338
• Gefahreneinstufungen: Acute Tox. 4 Oral - Eye Irrit. 2 - Skin Irrit. 2
• Lagerklassenschlüssel: 10 - Combustible liquids not in Storage Class 3
• WGK: WGK 3
• Flammpunkt (°F): 226.4 °F
• Flammpunkt (°C): 108 °C