Tris(dimethylamino)silane
Synonym(s):
(Me2N)3SiH, N,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine, TDMAS, Tris(dimethylamido)silane, Tris(dimethylamino)silane
Linear Formula:
((CH3)2N)3SiH
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