901624

Buffered oxide etchant (BOE) 6:1

• Sinonimo/i: BHF, Buffered HF
• Codice UNSPSC: 12161700
• NACRES: NA.23

Proprietà

• Forma fisica: liquid
• Livello qualitativo: 100

Descrizione

Descrizione generale

BOE 6:1 is 6 parts by volume 40% ammonium fluoride and 1 part by volume 49% HF.

Buffered oxide etchant (BOE) is a wet etchant used in microfabrication. Its primary use is in etching thin films of silicon dioxide (SiO₂) or silicon nitride (Si₃N₄). It is a mixture of a buffering agent, such as ammonium fluoride (NH₄F), and hydrofluoric acid (HF). Concentrated HF etches silicon dioxide too quickly for good process control and also peels photoresist used in lithographic patterning.

Applicazioni

Buffered oxide etchant (BOE) 6:1 can be used in the oxide removal of AlGaN/GaN-based high electron mobility transistors for gate photolithography. It can be used in a buffer oxide etchant method for the fabrication of micro biochip.

Informazioni sulla sicurezza

• Pittogrammi: GHS06,GHS05
• Avvertenze: Danger
• Indicazioni di pericolo: H300 + H310,H314,H331
• Consigli di prudenza: P261 - P271 - P280 - P303 + P361 + P353 - P304 + P340 + P310 - P305 + P351 + P338
• Classi di pericolo: Acute Tox. 1 Dermal - Acute Tox. 2 Oral - Acute Tox. 3 Inhalation - Eye Dam. 1 - Skin Corr. 1A
• Codice della classe di stoccaggio: 6.1B - Non-combustible acute toxic Cat. 1 and 2 / very toxic hazardous materials
• Classe di pericolosità dell'acqua (WGK): WGK 2
• Punto d’infiammabilità (°F): Not applicable
• Punto d’infiammabilità (°C): Not applicable