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760404

Tantalum(V) ethoxide

packaged for use in deposition systems

Sinonimo/i:

PET, Pentaethoxytantalum, Pentaethyl tantalate, Tantalum pentaethoxide

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About This Item

Formula condensata:
Ta(OC2H5)5
Numero CAS:
6074-84-6
Peso molecolare:
406.25
Beilstein:
3678999
Numero CE:
228-010-2
Numero MDL:
MFCD00049785
Codice UNSPSC:
12352103
ID PubChem:
329766860
NACRES:
NA.23

Forma fisica

liquid

Indice di rifrazione

n20/D 1.487 (lit.)

P. eboll.

155 °C/0.01 mmHg (lit.)

Punto di fusione

21 °C (lit.)

Densità

1.566 g/mL at 25 °C (lit.)

Stringa SMILE

CCO[Ta](OCC)(OCC)(OCC)OCC

InChI

1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5
HSXKFDGTKKAEHL-UHFFFAOYSA-N

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Applicazioni

Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods

Pittogrammi

Flame
GHS02

Avvertenze

Warning

Indicazioni di pericolo

H226

Classi di pericolo

Flam. Liq. 3

Codice della classe di stoccaggio

3 - Flammable liquids

Classe di pericolosità dell'acqua (WGK)

WGK 1

Punto d’infiammabilità (°F)

84.2 °F - closed cup

Punto d’infiammabilità (°C)

29 °C - closed cup

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