455199

Tetrakis(dimethylamido)hafnium(IV)

≥99.99%

• Sinonimo/i: TDMAH, Tetrakis(dimethylamino)hafnium(IV)
• Formula condensata: [(CH₃)₂N]₄Hf
• Numero CAS: 19782-68-4
• Peso molecolare: 354.79
• Numero MDL: MFCD01862473
• Codice UNSPSC: 12352103
• ID PubChem: 24869038
• NACRES: NA.23

Proprietà

• Livello qualitativo: 100
• Saggio: ≥99.99%
• Stato: low-melting solid
• Impiego in reazioni chimiche: core: hafnium
• Punto di fusione: 26-29 °C (lit.)
• Densità: 1.098 g/mL at 25 °C
• Stringa SMILE: CN(C)[Hf](N(C)C)(N(C)C)N(C)C
• InChI: 1S/4C2H6N.Hf/c4*1-3-2;/h4*1-2H3;/q4*-1;+4; ZYLGGWPMIDHSEZ-UHFFFAOYSA-N

Descrizione

Descrizione generale

Tetrakis(dimethylamido)hafnium(IV) is an organometallic compound consisting of a central hafnium atom (Hf) surrounded by four dimethylamido ligands (NMe₂). It is commonly used as a CVD/ALD precursor to produce high-quality Hf thin films. It is a solid with low melting point.

Applicazioni

Tetrakis(dimethylamido)hafnium(IV) can be used:

• As an atomic layer deposition(ALD) precursor for deposition of hafnium oxide thin films for advanced semiconductor devices.
• As a precursor to fabricate polymer-derived ceramic nanocomposites.
• To prepare HfO₂, CeO₂, and Ce-doped HfO₂ thin films on Ge substrates by using tris(isopropyl-cyclopentadienyl)cerium [Ce(iPrCp)₃] precursors with H₂O via ALD method.
• To produce Hf₃N₄ thin films with TDMAH and ammonia at low substrate temperatures at 150−250 °C.

Risultati analitici

Purity excludes ~2000 ppm Zr.

Informazioni sulla sicurezza

• Pittogrammi: GHS02,GHS05
• Avvertenze: Danger
• Indicazioni di pericolo: H228,H261,H314
• Consigli di prudenza: P210 - P231 + P232 - P280 - P305 + P351 + P338 - P310 - P422
• Classi di pericolo: Flam. Sol. 1 - Skin Corr. 1B - Water-react 2
• Rischi supp: EUH014
• Codice della classe di stoccaggio: 4.3 - Hazardous materials which set free flammable gases upon contact with water
• Classe di pericolosità dell'acqua (WGK): WGK 3
• Dispositivi di protezione individuale: Eyeshields, Faceshields, Gloves, type P3 (EN 143) respirator cartridges