496863

Pentakis(dimethylamino)tantal(V)

99.99%

• Synonym(e): PDMAT, TADMA, Ta(NMe₂)₅, Tantalum dimethylamide
• Lineare Formel: Ta(N(CH₃)₂)₅
• CAS-Nummer: 19824-59-0
• Molekulargewicht: 401.33
• MDL-Nummer: MFCD01631286
• UNSPSC-Code: 12352103
• PubChem Substanz-ID: 24873088
• NACRES: NA.23

Eigenschaften

• Qualitätsniveau: 100
• Assay: 99.99%
• Form: solid
• Eignung der Reaktion: core: tantalum; reagent type: catalyst
• mp (Schmelzpunkt): 100 °C (dec.) (lit.)
• SMILES String: CN(C)[Ta](N(C)C)(N(C)C)(N(C)C)N(C)C
• InChI: 1S/5C2H6N.Ta/c5*1-3-2;/h5*1-2H3;/q5*-1;+5
• InChIKey: VSLPMIMVDUOYFW-UHFFFAOYSA-N

Beschreibung

Allgemeine Beschreibung

Atomic number of base material: 73 Tantalum

Leistungsmerkmale und Vorteile

Volatile solid CVD precursor to tantalum nitride (TaN) thin films. Also yields tantalum oxide (Ta₂O₅) thin films when O₂, H₂O, NO or H₂O₂ is present during the deposition process. Ta₂O₅ thins films show promise as gate dielectric materials in the manufacture of integrated circuits.

Sicherheitshinweise

• Piktogramme: GHS02,GHS05
• Signalwort: Danger
• H-Sätze: H228,H260,H314
• P-Sätze: P210 - P231 + P232 - P260 - P280 - P303 + P361 + P353 - P305 + P351 + P338
• Gefahreneinstufungen: Eye Dam. 1 - Flam. Sol. 1 - Skin Corr. 1B - Water-react 1
• Lagerklassenschlüssel: 4.3 - Hazardous materials which set free flammable gases upon contact with water
• WGK: WGK 3
• Flammpunkt (°F): Not applicable
• Flammpunkt (°C): Not applicable
• Persönliche Schutzausrüstung: Eyeshields, Faceshields, Gloves, type P3 (EN 143) respirator cartridges