666610

Tetrakis(dimethylamido)hafnium(IV)

packaged for use in deposition systems

• 동의어(들): TDMAH, Tetrakis(dimethylamino)hafnium(IV)
• Linear Formula: [(CH₃)₂N]₄Hf
• CAS Number: 19782-68-4
• Molecular Weight: 354.79
• MDL number: MFCD01862473
• UNSPSC 코드: 12352103
• PubChem Substance ID: 24884811
• NACRES: NA.23

속성

• 분석: ≥99.99% (trace metals analysis)
• 형태: low-melting solid
• 반응 적합성: core: hafnium
• mp: 26-29 °C (lit.)
• density: 1.098 g/mL at 25 °C
• SMILES string: CN(C)[Hf](N(C)C)(N(C)C)N(C)C
• InChI: 1S/4C2H6N.Hf/c4*1-3-2;/h4*1-2H3;/q4*-1;+4
• InChI key: ZYLGGWPMIDHSEZ-UHFFFAOYSA-N

설명

일반 설명

Alkyl amides of Hafnium provide a convenient and effective atomic layer deposition precursor to smooth and and amorphous hafnium oxide thin films.

애플리케이션

Precursors Packaged for Depositions Systems

Used as precursor for atomic layer deposition of Hafnium Oxide nanolaminates, which are used as a reploacement for Silicon oxide in semiconductor devices.

안전성 정보

• 픽토그램: GHS02,GHS05
• 신호어: Danger
• 유해 및 위험 성명서: H228,H261,H314
• 예방조치 성명서: P210 - P231 + P232 - P280 - P305 + P351 + P338 - P370 + P378 - P402 + P404
• Hazard Classifications: Flam. Sol. 1 - Skin Corr. 1B - Water-react 2
• 보충제 위험성: EUH014
• Storage Class Code: 4.3 - Hazardous materials which set free flammable gases upon contact with water
• WGK: WGK 3
• Flash Point (°F): 109.4 °F - closed cup
• Flash Point (°C): 43 °C - closed cup
• 개인 보호 장비: Eyeshields, Faceshields, Gloves, type P3 (EN 143) respirator cartridges