Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Journal of nanoscience and nanotechnology (2014-04-18)

Shaoming Yang, Xiuqin Chen, Kazuo Yamamoto, Masanori Iitake, D Nishio-Hamane, Hideki Sakai, Masahiko Abe

要旨

The structural and functional characterizations of titanium nitride (TiN) advanced ceramic microsprings (CMSs), with a coil diameter of several micrometers and synthesized by chemical vapor deposition (CVD) were investigated by microscopy techniques. The CMSs were sufficiently mechanically elastic for extension to more than 1.3 times their original size, and they spontaneously contracted to their original state on releasing the tension. To explore their application to a microdevice, a method of manufacturing TiN-CMS microcircuit elements was developed. The I-V plots of the elements indicated that the CMSs were as conductive as metals.

材料

製品番号

ブランド

製品内容

348791

Sigma-Aldrich

チタン, foil, thickness 0.127 mm, 99.7% trace metals basis

366994

Sigma-Aldrich

チタン, powder, <45 μm avg. part. size, 99.98% trace metals basis

595063

Sigma-Aldrich

窒化チタン, <3 μm

267503

Sigma-Aldrich

チタン, foil, thickness 0.25 mm, 99.7% trace metals basis

268496

Sigma-Aldrich

チタン, powder, −100 mesh, 99.7% trace metals basis

460400

Sigma-Aldrich

チタン, wire, diam. 0.25 mm, 99.7% trace metals basis

268526

Sigma-Aldrich

チタン, sponge, 1-20 mm, 99.5% trace metals basis

GF16031843

チタン, mesh, 100x100mm, nominal aperture 0.19mm, wire diameter 0.23mm, 60x60 wires/inch, open area 20%, twill weave

348848

Sigma-Aldrich

チタン, foil, thickness 0.025 mm, 99.98% trace metals basis

369489

Sigma-Aldrich

チタン, foil, thickness 2.0 mm, 99.7% trace metals basis

GF29374005

チタン, mesh, 100x100mm, nominal aperture 4.3mm, wire diameter 1.5mm, 4.4x4.4 wires/inch, open area 94%, platinized diamond mesh

348805

Sigma-Aldrich

チタン, foil, thickness 0.5 mm, 99.99% trace metals basis

767506

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チタン, sputtering target, diam. × thickness 2.00 in. × 0.25 in., 99.995% trace metals basis

266035

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チタン, wire, diam. 1.0 mm, 99.99% trace metals basis

267481

Sigma-Aldrich

チタン, foil, thickness 0.25 mm, 99.99% trace metals basis

460397

Sigma-Aldrich

チタン, foil, thickness 0.127 mm, ≥99.99% trace metals basis

305812

Sigma-Aldrich

チタン, 5-10 mm, ≥99.99% trace metals basis (purity exclusive of Na and K content)

348864

Sigma-Aldrich

チタン, wire, diam. 0.5 mm, 99.99% trace metals basis

GF46592949

チタン, wire, straight, 1000mm, diameter 1.0mm, as drawn, 99.6+%

GF31127712

チタン, rod, 10mm, diameter 50mm, 99.99+%

GF14990935

チタン, tube, 1000mm, outside diameter 10.3mm, inside diameter 8.7mm, wall thickness 0.8mm, annealed, 99.6+%

433667

Sigma-Aldrich

チタン, evaporation slug, diam. × L 6.3 mm × 6.3 mm, ≥99.99% trace metals basis

GF62977540

チタン, tube, 200mm, outside diameter 2.03mm, inside diameter 1.63mm, wall thickness 0.2mm, annealed, 99.6+%

267902

Sigma-Aldrich

チタン, wire, diam. 0.81 mm, 99.7% trace metals basis

GF86399106

チタン, tube, 500mm, outside diameter 1.6mm, inside diameter 1.2mm, wall thickness 0.2mm, hard, 99.6+%

GF13900205

チタン, tube, 100mm, outside diameter 0.51mm, inside diameter 0.35mm, wall thickness 0.08mm, annealed, 99.6+%

GF49264713

チタン, tube, 200mm, outside diameter 1.6mm, inside diameter 1.2mm, wall thickness 0.2mm, hard, 99.6+%

GF43519945

チタン, wire reel, 2m, diameter 1.0mm, as drawn, 99.99+%

GF96834493

チタン, rod, 1000mm, diameter 5mm, annealed, 99.6+%

GF34739837

チタン, sphere, 200pcs, diameter 3mm, 99.6+%