759562

Tris(dimethylamino)silan

packaged for use in deposition systems

• Synonym(e): Tris(dimethylamino)silan
• Lineare Formel: ((CH₃)₂N)₃SiH
• CAS-Nummer: 15112-89-7
• Molekulargewicht: 161.32
• EG-Nummer: 239-165-0
• MDL-Nummer: MFCD00048006
• UNSPSC-Code: 12352300
• PubChem Substanz-ID: 329766793
• NACRES: NA.23

Eigenschaften

• Qualitätsniveau: 100
• Assay: ≥99.9% (GC)
• Form: liquid
• bp: 142 °C (lit.)
• mp (Schmelzpunkt): −90 °C (lit.)
• Dichte: 0.838 g/mL at 25 °C (lit.)
• SMILES String: CN(C)[SiH](N(C)C)N(C)C
• InChI: 1S/C6H19N3Si/c1-7(2)10(8(3)4)9(5)6/h10H,1-6H3
• InChIKey: TWVSWDVJBJKDAA-UHFFFAOYSA-N

Beschreibung

Anwendung

Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films. It is also used to form multicomponent silicon containing thin films. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range; thus making it a very good vapor deposition precursor.

Sicherheitshinweise

• Piktogramme: GHS02,GHS05,GHS06
• Signalwort: Danger
• H-Sätze: H225 - H261 - H302 - H311 - H314 - H330
• P-Sätze: P210 - P231 + P232 - P280 - P303 + P361 + P353 - P304 + P340 + P310 - P305 + P351 + P338
• Gefahreneinstufungen: Acute Tox. 1 Inhalation - Acute Tox. 3 Dermal - Acute Tox. 4 Oral - Eye Dam. 1 - Flam. Liq. 2 - Skin Corr. 1B - Water-react 2
• Zusätzliche Gefahrenhinweise: EUH029
• Lagerklassenschlüssel: 4.3 - Hazardous materials, which set free flammable gases upon contact with water
• WGK: WGK 3
• Flammpunkt (°F): 16.0 - 32.0 °F - closed cup
• Flammpunkt (°C): -8.89 - 0,00 °C - closed cup