NIST8820

Scanning Electron Microscope Scale Calibration Artifact

NIST^®SRM^®

• Fórmula empírica (Notação de Hill): Si
• Número CAS: 7440-21-3
• Peso molecular: 28.09
• Código UNSPSC: 41116107

Propriedades

• forma: chips
• embalagem: pkg of 1 g (20mm x 20mm chip)
• fabricante/nome comercial: NIST^®
• técnica(s): electron microscopy: suitable
• aplicação(ões): semiconductor
• temperatura de armazenamento: 15-25°C
• InChI: 1S/Si
• chave InChI: XUIMIQQOPSSXEZ-UHFFFAOYSA-N

Descrição

Descrição geral

Reference Material (RM) 8820 is primarily intended to be used for X and Y scale (or magnification) calibrations from less than 10 times magnifications to more than 100 000 times magnifications in scanning electron microscopes (SEMs). It was designed to provide good contrast at low and high electron landing energies (accelerating voltages). Beyond testing scale calibration, it can be used for non-linearity measurements, especially at lower than 10,000 times magnifications. It can also be used for optical and scanning probe and other types of microscopes. Most SEMs require a set of calibration structures of different sizes to cover the full range of possible magnifications. This Reference Material (in part using the ideas implemented in earlier NIST scale calibration artifacts) is designed to meet that need. A unit of RM 8820 consists of a 20 mm × 20 mm lithographically patterned silicon chip.

SRM 8820_cert

SRM 8820 _SDS

Outras notas

Please download a current certificate at nist.gov/SRM for current analytes and certified values.

Informações legais

NIST is a registered trademark of National Institute of Standards and Technology

SRM is a registered trademark of National Institute of Standards and Technology