760293

2,4,6,8-Tetramethylcyclotetrasiloxane

packaged for use in deposition systems

• 동의어(들): 1,3,5,7-Cyclotetra(methylsiloxane), 1,3,5,7-Tetramethylcyclotetrasiloxane, TMCTS
• Linear Formula: (HSiCH₃O)₄
• CAS Number: 2370-88-9
• Molecular Weight: 240.51
• Beilstein: 1775282
• EC Number: 219-137-4
• MDL number: MFCD00039567
• UNSPSC 코드: 12352103
• PubChem Substance ID: 329766852
• NACRES: NA.23

속성

• Grade: deposition grade
• 분석: ≥99.5% (GC); ≥99.999% (trace metals analysis)
• 형태: liquid
• refractive index: n20/D 1.387 (lit.)
• bp: 134 °C (lit.)
• mp: −69 °C (lit.)
• density: 0.986 g/mL at 25 °C (lit.)
• 저장 온도: 2-8°C
• SMILES string: C[SiH]1O[SiH](C)O[SiH](C)O[SiH](C)O1
• InChI: 1S/C4H16O4Si4/c1-9-5-10(2)7-12(4)8-11(3)6-9/h9-12H,1-4H3
• InChI key: BQYPERTZJDZBIR-UHFFFAOYSA-N

설명

애플리케이션

2, 4, 6, 8-Tetramethylcyclotetrasiloxane (TMCTS) is an important precursor for the deposition of polysiloxane, cyclic siloxane, silicon dioxide, oxycarbide thin films with low dielectric constant for microelectronics, semiconductors and other applications

특징 및 장점

Precursor for gate dielectrics in thin-film transistors (TFT), and is a component of photochemically formed SiO_X monolayers on TiO.

안전성 정보

• 픽토그램: GHS02
• 신호어: Warning
• 유해 및 위험 성명서: H226
• Hazard Classifications: Flam. Liq. 3
• Storage Class Code: 3 - Flammable liquids
• WGK: WGK 3
• Flash Point (°F): 75.2 °F - closed cup
• Flash Point (°C): 24 °C - closed cup