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蒸汽壓力
17.5 mmHg ( 20 °C)
品質等級
濃度
10 wt. % in H2O
折射率
n20/D 1.3521
密度
1.006 g/mL at 25 °C
SMILES 字串
[OH-].C[N+](C)(C)C
InChI
1S/C4H12N.H2O/c1-5(2,3)4;/h1-4H3;1H2/q+1;/p-1
InChI 密鑰
WGTYBPLFGIVFAS-UHFFFAOYSA-M
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一般說明
四甲基氢氧化铵(TMAH)是一种市售的季铵碱,其碱度明显高于氢氧化铵。
應用
四甲基氢氧化铵溶液(在 H2O 中为 10 wt.%)可用作:
TMAH 由于其高硅蚀刻速率,也可用作硅的各向异性蚀刻剂。使用 TMAH 的主要优点是,由于不存在碱离子,它不会对电路造成危险。
- 一种在 IPA 中使用 2-(3,4-环氧环己基)乙基三甲氧基硅烷(ECTMS)通过溶胶-凝胶法合成环氧多面体低聚倍半硅氧烷(EPOSS)的反应物。
- 一种用于修饰 SnO2 纳米晶体的离子液体,可作为钙钛矿太阳能电池中的有效电子传输层。
TMAH 由于其高硅蚀刻速率,也可用作硅的各向异性蚀刻剂。使用 TMAH 的主要优点是,由于不存在碱离子,它不会对电路造成危险。
訊號詞
Danger
危險分類
Acute Tox. 1 Dermal - Acute Tox. 3 Oral - Aquatic Chronic 3 - Eye Dam. 1 - Skin Corr. 1B - STOT RE 1 Dermal - STOT SE 1
標靶器官
Central nervous system, Liver,thymus
儲存類別代碼
6.1B - Non-combustible acute toxic Cat. 1 and 2 / very toxic hazardous materials
水污染物質分類(WGK)
WGK 3
閃點(°F)
Not applicable
閃點(°C)
Not applicable
個人防護裝備
Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter
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