NIST2134

Arsenimplantat in Silizium-Tiefenprofil-Standard

NIST SRM 2134

• UNSPSC-Code: 41116107
• NACRES: NA.24

Eigenschaften

• Qualität: certified reference material
• Qualitätsniveau: 100
• Verpackung: pkg of each
• Hersteller/Markenname: NIST^®
• Anwendung(en): semiconductor
• Format: matrix material

Beschreibung

Allgemeine Beschreibung

Each unit of SRM 2134 contains a single crystal silicon substrate, measuring 1 cm by 1 cm, which is ion-implanted with the isotope ⁷⁵ As at an approximate energy of 100 keV.

SRM 2134_cert

SRM 2134_SDS

Anwendung

The SRM is used to calibrate the secondary ion response to detect the minor and trace levels of arsenic within a silicon matrix using the analytical technique of secondary ion mass spectrometry (SIMS).

Leistungsmerkmale und Vorteile

• Available with a certificate documenting NIST-certified value for retained dose of ⁷⁵As atoms and the dose is expressed in units of arsenic mass per unit area.
• The reference and information values of elements are reported as mass fraction.
• Certified values are retained dose of ⁷⁵As atoms, and the dose is expressed in units of arsenic mass per unit area.
• The NIST certificate is provided with expiration certificate, use, storage, handling, and maintenance instructions.

Sonstige Hinweise

Example analytes are listed below as a reference. Please download a current certificate at nist.gov/SRM for current analytes and certified values.
Arsenic (⁷⁵As)

See certificate for values and more details at nist.gov/SRM.

Rechtliche Hinweise

NIST is a registered trademark of National Institute of Standards and Technology

Sicherheitshinweise

• Lagerklassenschlüssel: 13 - Non Combustible Solids
• WGK: nwg
• Flammpunkt (°F): Not applicable
• Flammpunkt (°C): Not applicable