579211

Tetrakis(dimethylamido)zirconium(IV)

electronic grade, ≥99.99% trace metals basis

• Synonym(s): TDMAZ, Tetrakis(dimethylamino)zirconium(IV)
• Linear Formula: [(CH₃)₂N]₄Zr
• CAS Number: 19756-04-8
• Molecular Weight: 267.53
• MDL number: MFCD00239502
• UNSPSC Code: 12352300
• PubChem Substance ID: 24880977
• NACRES: NA.23

Properties

• grade: electronic grade
• Quality Level: 100
• Assay: ≥99.99% trace metals basis
• form: solid
• reaction suitability: core: zirconium
• mp: 57-60 °C (lit.)
• storage temp.: 2-8°C
• SMILES string: CN(C)[Zr](N(C)C)(N(C)C)N(C)C
• InChI: 1S/4C2H6N.Zr/c4*1-3-2;/h4*1-2H3;/q4*-1;+4
• InChI key: DWCMDRNGBIZOQL-UHFFFAOYSA-N

Description

Application

Tetrakis(dimethylamido) zirconium (IV) may be used as a precursor for atomic layer deposition of zirconium which find applications ranging from gas sensors to high-k dielectrics in microelectronics.

Safety Information

• Pictograms: GHS02,GHS07
• Signal Word: Danger
• Hazard Statements: H228 - H261 - H315 - H319 - H335
• Precautionary Statements: P210 - P223 - P231 + P232 - P240 - P302 + P352 - P305 + P351 + P338
• Hazard Classifications: Eye Irrit. 2 - Flam. Sol. 1 - Skin Irrit. 2 - STOT SE 3 - Water-react 2
• Target Organs: Respiratory system
• Supplementary Hazards: EUH014
• Storage Class Code: 4.3 - Hazardous materials, which set free flammable gases upon contact with water
• WGK: WGK 3
• Flash Point(F): No data available
• Flash Point(C): No data available
• Personal Protective Equipment: dust mask type N95 (US), Eyeshields, Gloves