NIST8820

Scanning Electron Microscope Scale Calibration Artifact

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• 經驗公式（希爾表示法）: Si
• CAS號碼: 7440-21-3
• 分子量：: 28.09
• 分類程式碼代碼: 41116107

屬性

• 形狀: chips
• 包裝: pkg of 1 g (20mm x 20mm chip)
• 製造商／商標名: NIST^®
• 技術: electron microscopy: suitable
• 應用: semiconductor
• 儲存溫度: 15-25°C
• InChI: 1S/Si
• InChI 密鑰: XUIMIQQOPSSXEZ-UHFFFAOYSA-N

描述

一般說明

Reference Material (RM) 8820 is primarily intended to be used for X and Y scale (or magnification) calibrations from less than 10 times magnifications to more than 100 000 times magnifications in scanning electron microscopes (SEMs). It was designed to provide good contrast at low and high electron landing energies (accelerating voltages). Beyond testing scale calibration, it can be used for non-linearity measurements, especially at lower than 10,000 times magnifications. It can also be used for optical and scanning probe and other types of microscopes. Most SEMs require a set of calibration structures of different sizes to cover the full range of possible magnifications. This Reference Material (in part using the ideas implemented in earlier NIST scale calibration artifacts) is designed to meet that need. A unit of RM 8820 consists of a 20 mm × 20 mm lithographically patterned silicon chip.

SRM 8820_cert

SRM 8820 _SDS

其他說明

Please download a current certificate at nist.gov/SRM for current analytes and certified values.

法律資訊

NIST is a registered trademark of National Institute of Standards and Technology

SRM is a registered trademark of National Institute of Standards and Technology