454516

Tetrakis(trimethylsilyloxy)silane

97%

• Synonym(s): 1,1,1,5,5,5-Hexamethyl-3,3-bis[(trimethylsilyl)oxy]trisiloxane, Tetrakis(trimethylsilyl) silicate
• Linear Formula: [(CH₃)₃SiO]₄Si
• CAS Number: 3555-47-3
• Molecular Weight: 384.84
• EC Number: 222-613-4
• MDL number: MFCD00051587
• UNSPSC Code: 12352103
• PubChem Substance ID: 24868927
• NACRES: NA.22

Properties

• Quality Level: 100
• Assay: 97%
• refractive index: n20/D 1.389 (lit.)
• bp: 103-106 °C/2 mmHg (lit.)
• density: 0.87 g/mL at 25 °C (lit.)
• SMILES string: C[Si](C)(C)O[Si](O[Si](C)(C)C)(O[Si](C)(C)C)O[Si](C)(C)C
• InChI: 1S/C12H36O4Si5/c1-17(2,3)13-21(14-18(4,5)6,15-19(7,8)9)16-20(10,11)12/h1-12H3
• InChI key: VNRWTCZXQWOWIG-UHFFFAOYSA-N

Description

Application

Tetrakis(trimethylsilyloxy)silane (TTMS) is an organosilicon compound used as a precursor to prepare nanostructured organosilicon polymer films by plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure. TTMS along with cyclohexane can also be used to synthesize low dielectric constant SiCOH films by PECVD method.

Safety Information

• Pictograms: GHS07
• Signal Word: Warning
• Hazard Statements: H315,H319,H335
• Precautionary Statements: P261 - P264 - P271 - P280 - P302 + P352 - P305 + P351 + P338
• Hazard Classifications: Eye Irrit. 2 - Skin Irrit. 2 - STOT SE 3
• Target Organs: Respiratory system
• Storage Class Code: 10 - Combustible liquids
• WGK: WGK 3
• Flash Point(F): 168.8 °F - closed cup
• Flash Point(C): 76 °C - closed cup
• Personal Protective Equipment: dust mask type N95 (US), Eyeshields, Gloves