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vapor density
9 (vs air)
vapor pressure
0.3 mmHg ( 15 °C)
composition
volatiles, 50-80%
bp
100 °C/1 atm
solubility
H2O: miscible at 20 °C
General description
Nickel compatible gold etchant is an etching solution that can be used in the removal of the gold layer from the surface. Compatibility of gold etchants with nickel allows it to be utilized in applications where nickel is used as a dominant material in the fabrication of micro-electro-mechanical systems (MEMS).
Application
Elective general-purpose etchant for gold. Compatible with negative and positive photoresists.
Features and Benefits
Etching readily controlled with minimum undercutting. Room temperature operated. Cyanide-free, no attack of nickel films.
Signal Word
Danger
Hazard Statements
Precautionary Statements
Hazard Classifications
STOT RE 1 Oral
Target Organs
Thyroid
Storage Class Code
6.1D - Non-combustible acute toxic Cat.3 / toxic hazardous materials or hazardous materials causing chronic effects
WGK
WGK 3
Flash Point(F)
Not applicable
Flash Point(C)
Not applicable
Personal Protective Equipment
dust mask type N95 (US), Eyeshields, Gloves
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Protocols
Negative Photoresist Procedure
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