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553468

Sigma-Aldrich

三(叔丁氧基)硅烷醇

99.999%

别名:

TBS

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About This Item

线性分子式:
((CH3)3CO)3SiOH
CAS号:
18166-43-3
分子量:
264.43
MDL號碼:
MFCD00271024
分類程式碼代碼:
12352103
PubChem物質ID:
24879332
NACRES:
NA.23

化驗

99.999%

形狀

solid

bp

205-210 °C (lit.)

mp

63-65 °C (lit.)

SMILES 字串

CC(C)(C)O[Si](O)(OC(C)(C)C)OC(C)(C)C

InChI

1S/C12H28O4Si/c1-10(2,3)14-17(13,15-11(4,5)6)16-12(7,8)9/h13H,1-9H3

InChI 密鑰

HLDBBQREZCVBMA-UHFFFAOYSA-N

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相关类别

一般說明

三(叔丁氧基)硅烷醇可以与各种金属烷基酰胺反应，作为气相沉积金属硅酸盐的前体。它也是二氧化硅沉积的理想前体。

應用

三(叔丁氧基)硅烷醇与四(二甲基氨基)-铪蒸气（Hf(N(CH3)2)4）反应，用于硅酸铪玻璃膜的气相沉积。三(叔丁氧基)硅烷醇被用于无定形二氧化硅和氧化铝纳米层的高度共形层的原子层沉积（ALD）。

儲存類別代碼

11 - Combustible Solids

水污染物質分類（WGK）

WGK 3

閃點（°F）

Not applicable

閃點（°C）

Not applicable

個人防護裝備

Eyeshields, Gloves, type N95 (US)

历史批次信息供参考:

分析证书(COA)

Lot/Batch Number
SHBL5061
SHBL0342
SHBK7740
SHBK3444
SHBK3445

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