164410
Benzocyclobutene
97%
Synonym(s):
Bicyclo[4.2.0]octa-1,3,5-triene
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About This Item
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Assay
97%
form
liquid
refractive index
n20/D 1.541 (lit.)
bp
150 °C/748 mmHg (lit.)
density
0.957 g/mL at 25 °C (lit.)
SMILES string
C1Cc2ccccc12
InChI
1S/C8H8/c1-2-4-8-6-5-7(8)3-1/h1-4H,5-6H2
InChI key
UMIVXZPTRXBADB-UHFFFAOYSA-N
Application
Benzocyclobutene was used as the adhesive bonding material in adhesive wafer-level bonding technique. Photosensitive benzocyclobutene has been widely used as dielectric material in multilayer packaging applications. It was used in fabrication of high density multilayer interconnect structures using gold metallization and polymer interlayer dielectric.
Signal Word
Warning
Hazard Statements
Precautionary Statements
Hazard Classifications
Flam. Liq. 3
Storage Class Code
3 - Flammable liquids
WGK
WGK 3
Flash Point(F)
96.8 °F - closed cup
Flash Point(C)
36 °C - closed cup
Personal Protective Equipment
dust mask type N95 (US), Eyeshields, Gloves
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Photosensitive benzocyclobutene for stress-buffer and passivation applications (one mask manufacturing process).
Electronic Components and Technology Conference, 1997. Proceedings., 47th. IEEE, 47 (1997)
Processing and microwave characterization of multilevel interconnects using benzocyclobutene dielectric.
IEEE Transactions on Components, Hybrids, and Manufacturing, 16(7), 714-719 (1993)
Selective wafer-level adhesive bonding with benzocyclobutene for fabrication of cavities.
Sens. Actuators, 105(3), 297-304 (2003)
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