469947

Tris(dimethylamido)aluminum(III)

• Synonym(s): Hexakis(dimethylamido)dialuminum, Tris(dimethylamino)alane dimer
• Linear Formula: Al(N(CH₃)₂)₃
• CAS Number: 32093-39-3
• Molecular Weight: 159.21
• MDL number: MFCD00269811
• UNSPSC Code: 12352103
• PubChem Substance ID: 24870625
• NACRES: NA.23

Properties

• form: solid
• reaction suitability: core: aluminum
• mp: 82-84 °C (lit.)
• density: 0.865 g/mL at 25 °C (lit.)
• SMILES string: CN(C)[Al](N(C)C)N(C)C.CN(C)[Al](N(C)C)N(C)C
• InChI: 1S/6C2H6N.2Al/c6*1-3-2;;/h6*1-2H3;;/q6*-1;2*+3
• InChI key: JGZUJELGSMSOID-UHFFFAOYSA-N

Description

General description

Atomic number of base material: 13 Aluminum

Application

Tris(dimethylamido)aluminum(III) may be used as a precursor to aluminum nitride (AlN) thin films by organometallic chemical vapor deposition (OMCVD).

Safety Information

• Pictograms: GHS02,GHS05
• Signal Word: Danger
• Hazard Statements: H260,H314
• Precautionary Statements: P223 - P231 + P232 - P280 - P305 + P351 + P338 - P370 + P378 - P422
• Hazard Classifications: Skin Corr. 1B - Water-react 1
• Supplementary Hazards: EUH014
• Storage Class Code: 4.3 - Hazardous materials which set free flammable gases upon contact with water
• WGK: WGK 3
• Flash Point(F): 70.0 °F - closed cup
• Flash Point(C): 21.1 °C - closed cup
• Personal Protective Equipment: dust mask type N95 (US), Eyeshields, Gloves