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NIST2134

Arsenic implant in silicon depth profile standard

NIST SRM 2134

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About This Item

UNSPSC Code:
41116107
NACRES:
NA.24

grade

certified reference material

Quality Level

100

packaging

pkg of each

manufacturer/tradename

NIST®

application(s)

semiconductor

format

matrix material

General description

Each unit of SRM 2134 contains a single crystal silicon substrate, measuring 1 cm by 1 cm, which is ion-implanted with the isotope 75 As at an approximate energy of 100 keV.

SRM 2134_cert

SRM 2134_SDS

Application

The SRM is used to calibrate the secondary ion response to detect the minor and trace levels of arsenic within a silicon matrix using the analytical technique of secondary ion mass spectrometry (SIMS).

Features and Benefits

  • Available with a certificate documenting NIST-certified value for retained dose of 75As atoms and the dose is expressed in units of arsenic mass per unit area.
  • The reference and information values of elements are reported as mass fraction.
  • Certified values are retained dose of 75As atoms, and the dose is expressed in units of arsenic mass per unit area.
  • The NIST certificate is provided with expiration certificate, use, storage, handling, and maintenance instructions.

Other Notes

Example analytes are listed below as a reference. Please download a current certificate at nist.gov/SRM for current analytes and certified values.
Arsenic (75As)

See certificate for values and more details at nist.gov/SRM.

Legal Information

NIST is a registered trademark of National Institute of Standards and Technology

related product

Product No.
Description
Pricing

Storage Class Code

13 - Non Combustible Solids

WGK

nwg

Flash Point(F)

Not applicable

Flash Point(C)

Not applicable

Regulatory Listings

Regulatory Listings are mainly provided for chemical products. Only limited information can be provided here for non-chemical products. No entry means none of the components are listed. It is the user’s obligation to ensure the safe and legal use of the product.

ISHL Indicated Name

Substances Subject to be Indicated Names

ISHL Notified Names

Substances Subject to be Notified Names

JAN Code

NIST2134:

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Certificates of Analysis (COA)

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