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667498

Sigma-Aldrich

Tungsten etchant

Synonym(s):

Tungsten etch

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About This Item

MDL number:
MFCD08705365
UNSPSC Code:
12352300
NACRES:
NA.23

Quality Level

100

Related Categories

General description

Tungsten etchant is a mixture of potassium hydroxide and potassium ferricyanide based solution that facilitates the removal of tungsten and other materials like aluminium by dipping the substrate into the etching solution.

Application

Selective etchants for tungsten thin-film metallizations used in semiconductor and microelectronics technology. Etchants are buffered, mildly alkaline ferricyanide-based formulations providing high resolution patterns with minimal undercutting and photoresist compatibility. Etchant is ready to use (no dilution required). Controlled, uniform etching is achieved by immersion or spray etch technique. Etch Capacity (rate declines at ∼70%) of 64 g/gallon. Recommended Operating Temperatures: 20-80 °C (30-40 °C most common).

Preparation Note

1. Select your etching method according to the table belowEtch Rate (Immersion) Etch Rate (Spray)
  • 20°C = 30 Å/second
  • 30°C = 140 Å/second 20°C = 80 Å/second
  • 60°C = 250 Å/second

2. Rinse with DI water

Pictograms

Corrosion
GHS05

Signal Word

Danger

Hazard Statements

H290,H314,H412

Hazard Classifications

Aquatic Chronic 3 - Eye Dam. 1 - Met. Corr. 1 - Skin Corr. 1A

Supplementary Hazards

EUH032

Storage Class Code

8B - Non-combustible corrosive hazardous materials

WGK

WGK 2

Flash Point(F)

Not applicable

Flash Point(C)

Not applicable

Personal Protective Equipment

dust mask type N95 (US), Eyeshields, Gloves

Regulatory Listings

Regulatory Listings are mainly provided for chemical products. Only limited information can be provided here for non-chemical products. No entry means none of the components are listed. It is the user’s obligation to ensure the safe and legal use of the product.

PDSCL

Deleterious substance

ISHL Indicated Name

Substances Subject to be Indicated Names

ISHL Notified Names

Substances Subject to be Notified Names

JAN Code

667498-VAR:
667498-BULK:
667498-500ML:4548173241890

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Certificates of Analysis (COA)

Lot/Batch Number
MKCQ1447
MKCJ2973
MKCJ1450
MKCH5365
MKCG8743

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Microelectronic Engineering, 46(1-4), 271-274 (1999)
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Shao F, et al.
Materials Sciences and Applications, 3(03), 157-157 (2012)
Electrostatically actuated copper-blade microrelays.
Lee H, et al.
Sensors and actuators A, Physical, 100(1), 105-113 (2002)

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