NIST2133

Phosphorus implant in silicon depth profile standard

NIST^® SRM^® 2133

• Codice UNSPSC: 41116107
• NACRES: NA.24

Proprietà

• Grado: certified reference material
• Livello qualitativo: 100
• Confezionamento: pkg of each
• Produttore/marchio commerciale: NIST^®
• applicazioni: semiconductor
• Formato: matrix material

Descrizione

Descrizione generale

The SRM contains a single crystal silicon substrate measuring 1 cm × 1 cm, which is ion-implanted with the isotope 31P at a nominal energy of 100 keV.

SRM 2133_cert

SRM 2133_SDS

Applicazioni

The SRM is intended to calibrate the secondary ion response for minor and trace concentrations of phosphorus within a silicon matrix using the secondary ion mass spectrometry (SIMS) method.

Caratteristiche e vantaggi

• Available with certificate documenting NIST-certified retained dose of 31P atoms which is obtained through radiochemical neutron activation analysis (RNAA).
• The NIST certificate is provided with expiration certificate, storage, handling, use, and maintenance instructions.

Altre note

Example analytes are listed below as a reference. Please download a current certificate at nist.gov/SRM for current analytes and certified values.
Phosphorus (³¹P)

Note legali

NIST is a registered trademark of National Institute of Standards and Technology

SRM is a registered trademark of National Institute of Standards and Technology

Informazioni sulla sicurezza

• Codice della classe di stoccaggio: 13 - Non Combustible Solids
• Classe di pericolosità dell'acqua (WGK): WGK 3
• Punto d’infiammabilità (°F): Not applicable
• Punto d’infiammabilità (°C): Not applicable