760293

2,4,6,8-Tetramethylcyclotetrasiloxane

packaged for use in deposition systems

• Synonym(s): 1,3,5,7-Cyclotetra(methylsiloxane), 1,3,5,7-Tetramethylcyclotetrasiloxane, TMCTS
• Linear Formula: (HSiCH₃O)₄
• CAS Number: 2370-88-9
• Molecular Weight: 240.51
• Beilstein: 1775282
• EC Number: 219-137-4
• MDL number: MFCD00039567
• UNSPSC Code: 12352103
• PubChem Substance ID: 329766852
• NACRES: NA.23

Properties

• grade: deposition grade
• Assay: ≥99.5% (GC); ≥99.999% (trace metals analysis)
• form: liquid
• refractive index: n20/D 1.387 (lit.)
• bp: 134 °C (lit.)
• mp: −69 °C (lit.)
• density: 0.986 g/mL at 25 °C (lit.)
• storage temp.: 2-8°C
• SMILES string: C[SiH]1O[SiH](C)O[SiH](C)O[SiH](C)O1
• InChI: 1S/C4H16O4Si4/c1-9-5-10(2)7-12(4)8-11(3)6-9/h9-12H,1-4H3
• InChI key: BQYPERTZJDZBIR-UHFFFAOYSA-N

Description

Application

2, 4, 6, 8-Tetramethylcyclotetrasiloxane (TMCTS) is an important precursor for the deposition of polysiloxane, cyclic siloxane, silicon dioxide, oxycarbide thin films with low dielectric constant for microelectronics, semiconductors and other applications

Features and Benefits

Precursor for gate dielectrics in thin-film transistors (TFT), and is a component of photochemically formed SiO_X monolayers on TiO.

Safety Information

• Pictograms: GHS02
• Signal Word: Warning
• Hazard Statements: H226
• Hazard Classifications: Flam. Liq. 3
• Storage Class Code: 3 - Flammable liquids
• WGK: WGK 3
• Flash Point(F): 75.2 °F - closed cup
• Flash Point(C): 24 °C - closed cup