NIST2134
Arsenic implant in silicon depth profile standard
NIST SRM 2134
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certified reference material
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NIST®
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semiconductor
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matrix material
General description
This Standard Reference Material (SRM) is intended for use in calibrating secondary ion response to minor and trace levels of arsenic in a silicon matrix by the analytical technique of secondary ion mass spectrometry (SIMS). It may also be used by a laboratory as a transfer standard for the calibration of working standards of arsenic in silicon.For more information, please refer to the SDS and COA.
SRM 2134_cert
SRM 2134_SDS
SRM 2134_cert
SRM 2134_SDS
Other Notes
Example analytes are listed below as a reference. Please download a current certificate at nist.gov/SRM for current analytes and certified values.
Arsenic (75As)
See certificate for values and more details at nist.gov/SRM.
Arsenic (75As)
See certificate for values and more details at nist.gov/SRM.
Legal Information
NIST is a registered trademark of National Institute of Standards and Technology
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Description
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Storage Class Code
13 - Non Combustible Solids
WGK
nwg
Flash Point(F)
Not applicable
Flash Point(C)
Not applicable
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