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NIST2134

Arsenic implant in silicon depth profile standard

NIST SRM 2134

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About This Item

UNSPSC Code:
12352200
NACRES:
NA.24

grade

certified reference material

Quality Level

packaging

pkg of each

manufacturer/tradename

NIST®

application(s)

semiconductor

format

matrix material

General description

This Standard Reference Material (SRM) is intended for use in calibrating secondary ion response to minor and trace levels of arsenic in a silicon matrix by the analytical technique of secondary ion mass spectrometry (SIMS). It may also be used by a laboratory as a transfer standard for the calibration of working standards of arsenic in silicon.For more information, please refer to the SDS and COA.

SRM 2134_cert

SRM 2134_SDS

Other Notes

Example analytes are listed below as a reference. Please download a current certificate at nist.gov/SRM for current analytes and certified values.
Arsenic (75As)

See certificate for values and more details at nist.gov/SRM.

Legal Information

NIST is a registered trademark of National Institute of Standards and Technology

related product

Storage Class Code

13 - Non Combustible Solids

WGK

nwg

Flash Point(F)

Not applicable

Flash Point(C)

Not applicable


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Certificates of Analysis (COA)

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