NIST2133

Phosphorimplantat in Silizium-Tiefenprofil Standard

NIST^® SRM^® 2133

• UNSPSC-Code: 41116107
• NACRES: NA.24

Eigenschaften

• Qualität: certified reference material
• Qualitätsniveau: 100
• Verpackung: pkg of each
• Hersteller/Markenname: NIST^®
• Anwendung(en): semiconductor
• Format: matrix material

Beschreibung

Allgemeine Beschreibung

The SRM contains a single crystal silicon substrate measuring 1 cm × 1 cm, which is ion-implanted with the isotope 31P at a nominal energy of 100 keV.

SRM 2133_cert

SRM 2133_SDS

Anwendung

The SRM is intended to calibrate the secondary ion response for minor and trace concentrations of phosphorus within a silicon matrix using the secondary ion mass spectrometry (SIMS) method.

Leistungsmerkmale und Vorteile

• Available with certificate documenting NIST-certified retained dose of 31P atoms which is obtained through radiochemical neutron activation analysis (RNAA).
• The NIST certificate is provided with expiration certificate, storage, handling, use, and maintenance instructions.

Sonstige Hinweise

Example analytes are listed below as a reference. Please download a current certificate at nist.gov/SRM for current analytes and certified values.
Phosphorus (³¹P)

Rechtliche Hinweise

NIST is a registered trademark of National Institute of Standards and Technology

SRM is a registered trademark of National Institute of Standards and Technology

Sicherheitshinweise

• Lagerklassenschlüssel: 13 - Non Combustible Solids
• WGK: WGK 3
• Flammpunkt (°F): Not applicable
• Flammpunkt (°C): Not applicable