469858

Tetrakis(dimethylamido)titanium(IV)

99.999% trace metals basis

• Synonym(s): TDMAT, Tetrakis(dimethylamino)titanium(IV)
• Linear Formula: [(CH₃)₂N]₄Ti
• CAS Number: 3275-24-9
• Molecular Weight: 224.17
• EC Number: 221-904-3
• MDL number: MFCD00014861
• UNSPSC Code: 12352103
• PubChem Substance ID: 24870618
• NACRES: NA.23

Properties

• Quality Level: 200
• Assay: 99.999% trace metals basis
• form: liquid
• reaction suitability: core: titanium
• bp: 50 °C/0.5 mmHg (lit.)
• density: 0.947 g/mL at 25 °C (lit.)
• SMILES string: CN(C)[Ti](N(C)C)(N(C)C)N(C)C
• InChI: 1S/4C2H6N.Ti/c4*1-3-2;/h4*1-2H3;/q4*-1;+4
• InChI key: MNWRORMXBIWXCI-UHFFFAOYSA-N

Description

General description

Please inquire for bulk quantity, pricing, and packaging options.

Application

Tetrakis(dimethylamido)titanium(IV) (TDMAT) is a precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD)and titanium dioxide thin films by atomic layer deposition (ALD).TDMAT undergoes exothermal reaction with excess cyclopentadiene to yield tris(dimethylamido)(η5-cyclopentadienyl)titanium(IV).

Safety Information

• Pictograms: GHS02,GHS05
• Signal Word: Danger
• Hazard Statements: H225,H260,H314
• Precautionary Statements: P210 - P223 - P231 + P232 - P280 - P303 + P361 + P353 - P305 + P351 + P338
• Hazard Classifications: Flam. Liq. 2 - Skin Corr. 1B - Water-react 1
• Supplementary Hazards: EUH014
• Storage Class Code: 4.3 - Hazardous materials which set free flammable gases upon contact with water
• WGK: WGK 3
• Flash Point(F): -22.0 °F - closed cup
• Flash Point(C): -30 °C - closed cup
• Personal Protective Equipment: dust mask type N95 (US), Eyeshields, Gloves