205184

Hexachlorodisilane

96%

• Sinónimos: 1,1,1,2,2,2-Hexachlorodisilane, Disilicon hexachloride, HCDS
• Fórmula lineal: (SiCl₃)₂
• Número de CAS: 13465-77-5
• Peso molecular: 268.89
• EC Number: 236-704-1
• MDL number: MFCD00011599
• UNSPSC Code: 12352103
• PubChem Substance ID: 24852311
• NACRES: NA.23

Propiedades

• assay: 96%
• form: liquid
• refractive index: n20/D 1.475 (lit.)
• bp: 144-145.5 °C (lit.)
• density: 1.562 g/mL at 25 °C (lit.)
• SMILES string: Cl[Si](Cl)(Cl)[Si](Cl)(Cl)Cl
• InChI: 1S/Cl6Si2/c1-7(2,3)8(4,5)6
• InChI key: LXEXBJXDGVGRAR-UHFFFAOYSA-N

Descripción

General description

Hexachlorodisilane (HCDS) is a chlorosilane used as a precursor for producing disilanes. It is a dioxidizer that is used in the production of silicon films and silicon nitride based films.

Application

HCDS can be used in the fabrication of silica aerogels by chemical vapor deposition (CVD), which can be potentially used as encapsulating agents and thermal insulators. It can also be used to synthesize 1,1,1,2,2,2-hexaamino-disilanes using CVD, which forms silicon-based films for microelectronic-based applications.

HCDS may be used as a reducing agent. It may be combined with ammonia to form silicon nitride by chemical vapor deposition(CVD) technique.

Información de seguridad

• pictograms: GHS05
• signalword: Danger
• hcodes: H314
• pcodes: P280 - P303 + P361 + P353 - P304 + P340 + P310 - P305 + P351 + P338 - P363 - P405
• Hazard Classifications: Skin Corr. 1B
• supp_hazards: EUH014
• Storage Class: 8A - Combustible corrosive hazardous materials
• wgk_germany: WGK 3
• flash_point_f: Not applicable
• flash_point_c: Not applicable
• ppe: Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter