MilliporeSigma
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205184

Sigma-Aldrich

Hexachlorodisilane

96%

Synonym(s):
HCDS, 1,1,1,2,2,2-Hexachlorodisilane, Disilicon hexachloride
Linear Formula:
(SiCl3)2
CAS Number:
Molecular Weight:
268.89
EC Number:
MDL number:
PubChem Substance ID:
NACRES:
NA.23

assay

96%

form

liquid

refractive index

n20/D 1.475 (lit.)

bp

144-145.5 °C (lit.)

density

1.562 g/mL at 25 °C (lit.)

SMILES string

Cl[Si](Cl)(Cl)[Si](Cl)(Cl)Cl

InChI

1S/Cl6Si2/c1-7(2,3)8(4,5)6

InChI key

LXEXBJXDGVGRAR-UHFFFAOYSA-N

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General description

Hexachlorodisilane (HCDS) is a chlorosilane used as a precursor for producing disilanes. It is a dioxidizer that is used in the production of silicon films and silicon nitride based films.

Application

HCDS may be used as a reducing agent. It may be combined with ammonia to form silicon nitride by chemical vapor deposition(CVD) technique.
HCDS can be used in the fabrication of silica aerogels by chemical vapor deposition (CVD), which can be potentially used as encapsulating agents and thermal insulators. It can also be used to synthesize 1,1,1,2,2,2-hexaamino-disilanes using CVD, which forms silicon-based films for microelectronic-based applications.

Packaging

5, 25 g in ampule

Pictograms

Corrosion

Signal Word

Danger

Hazard Statements

Hazard Classifications

Skin Corr. 1B

Supplementary Hazards

Storage Class Code

8A - Combustible, corrosive hazardous materials

WGK

WGK 3

Flash Point(F)

Not applicable

Flash Point(C)

Not applicable

Personal Protective Equipment

dust mask type N95 (US), Eyeshields, Gloves

Certificate of Analysis

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Certificate of Origin

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