- Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.
Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.
Journal of nanoscience and nanotechnology (2014-04-18)
Shaoming Yang, Xiuqin Chen, Kazuo Yamamoto, Masanori Iitake, D Nishio-Hamane, Hideki Sakai, Masahiko Abe
PMID24738385
ABSTRACT
The structural and functional characterizations of titanium nitride (TiN) advanced ceramic microsprings (CMSs), with a coil diameter of several micrometers and synthesized by chemical vapor deposition (CVD) were investigated by microscopy techniques. The CMSs were sufficiently mechanically elastic for extension to more than 1.3 times their original size, and they spontaneously contracted to their original state on releasing the tension. To explore their application to a microdevice, a method of manufacturing TiN-CMS microcircuit elements was developed. The I-V plots of the elements indicated that the CMSs were as conductive as metals.
MATERIALS
Product Number
Brand
Product Description
Titanium, IRMM®, certified reference material, 0.1 mm foil
Sigma-Aldrich
Titanium, evaporation slug, diam. × L 6.3 mm × 6.3 mm, ≥99.99% trace metals basis
Sigma-Aldrich
Titanium, sputtering target, diam. × thickness 2.00 in. × 0.25 in., 99.995% trace metals basis
Titanium, IRMM®, certified reference material, 0.5 mm wire
Sigma-Aldrich
Titanium, 5-10 mm, ≥99.99% trace metals basis (purity exclusive of Na and K content)