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Tetrakis(ethylmethylamido)zirconium(IV) packaged for use in deposition systems

Tetrakis(ethylmethylamido)zirconium(IV)

Tetrakis(ethylmethylamido)zirconium(IV) packaged for use in deposition systems
Synonym(s):
TEMAZ, Tetrakis(ethylmethylamino)zirconium(IV)
Linear Formula:
Zr(NCH3C2H5)4
CAS Number:
Molecular Weight:
323.63

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