Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Journal of nanoscience and nanotechnology (2014-04-18)

Shaoming Yang, Xiuqin Chen, Kazuo Yamamoto, Masanori Iitake, D Nishio-Hamane, Hideki Sakai, Masahiko Abe

ABSTRACT

The structural and functional characterizations of titanium nitride (TiN) advanced ceramic microsprings (CMSs), with a coil diameter of several micrometers and synthesized by chemical vapor deposition (CVD) were investigated by microscopy techniques. The CMSs were sufficiently mechanically elastic for extension to more than 1.3 times their original size, and they spontaneously contracted to their original state on releasing the tension. To explore their application to a microdevice, a method of manufacturing TiN-CMS microcircuit elements was developed. The I-V plots of the elements indicated that the CMSs were as conductive as metals.

MATERIALS

Product Number

Brand

Product Description

IRMM531C

Titanium, IRMM^®, certified reference material, 0.5 mm wire

IRMM531B

Titanium, IRMM^®, certified reference material, 0.5 mm foil

369489

Sigma-Aldrich

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267902

Sigma-Aldrich

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460400

Sigma-Aldrich

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266035

Sigma-Aldrich

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348791

Sigma-Aldrich

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348848

Sigma-Aldrich

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595063

Sigma-Aldrich

Titanium nitride, <3 μm

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Titanium, wire reel, 100m, diameter 0.25mm, as drawn, 99.6+%

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