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Tetrakis(ethylmethylamido)zirconium(IV) packaged for use in deposition systems

Tetrakis(ethylmethylamido)zirconium(IV)

Tetrakis(ethylmethylamido)zirconium(IV) packaged for use in deposition systems

Synonym(s):

TEMAZ, Tetrakis(ethylmethylamino)zirconium(IV)

Linear Formula:

Zr(NCH₃C₂H₅)₄

CAS Number:

Molecular Weight:

323.63

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Sigma-Aldrich (2)

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553131

Tetrakis(ethylmethylamido)zirconium(IV), ≥99.99% trace metals basis

725528

Tetrakis(ethylmethylamido)zirconium(IV), packaged for use in deposition systems