Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Journal of nanoscience and nanotechnology (2014-04-18)

Shaoming Yang, Xiuqin Chen, Kazuo Yamamoto, Masanori Iitake, D Nishio-Hamane, Hideki Sakai, Masahiko Abe

초록

The structural and functional characterizations of titanium nitride (TiN) advanced ceramic microsprings (CMSs), with a coil diameter of several micrometers and synthesized by chemical vapor deposition (CVD) were investigated by microscopy techniques. The CMSs were sufficiently mechanically elastic for extension to more than 1.3 times their original size, and they spontaneously contracted to their original state on releasing the tension. To explore their application to a microdevice, a method of manufacturing TiN-CMS microcircuit elements was developed. The I-V plots of the elements indicated that the CMSs were as conductive as metals.

MATERIALS

제품 번호

브랜드

제품 설명

IRMM531B

Titanium, IRMM^®, certified reference material, 0.5 mm foil

IRMM531C

Titanium, IRMM^®, certified reference material, 0.5 mm wire

267902

Sigma-Aldrich

Titanium, wire, diam. 0.81 mm, 99.7% trace metals basis

460400

Sigma-Aldrich

Titanium, wire, diam. 0.25 mm, 99.7% trace metals basis

348848

Sigma-Aldrich

Titanium, foil, thickness 0.025 mm, 99.98% trace metals basis

348791

Sigma-Aldrich

Titanium, foil, thickness 0.127 mm, 99.7% trace metals basis

369489

Sigma-Aldrich

Titanium, foil, thickness 2.0 mm, 99.7% trace metals basis

266035

Sigma-Aldrich

Titanium, wire, diam. 1.0 mm, 99.99% trace metals basis

595063

Sigma-Aldrich

Titanium nitride, <3 μm

GF94607040

Titanium, tube, 1000mm, outside diameter 4.25mm, inside diameter 3.75mm, wall thickness 0.25mm, annealed, 99.6+%

GF23860144

Titanium, tube, 500mm, outside diameter 6.35mm, inside diameter 4.57mm, wall thickness 0.89mm, annealed, 99.6+%

GF32919925

Titanium, tube, 500mm, outside diameter 10.3mm, inside diameter 8.7mm, wall thickness 0.8mm, annealed, 99.6+%

GF94150593

Titanium, wire reel, 10m, diameter 1.5mm, as drawn, 99.6+%

GF82635138

Titanium, tube, 500mm, outside diameter 6.35mm, inside diameter 5.53mm, wall thickness 0.41mm, annealed, 99.6+%

GF75518624

Titanium, wire reel, 20m, diameter 1.5mm, as drawn, 99.6+%

GF51690663

Titanium, wire reel, 5m, diameter 0.5mm, as drawn, 99.6+%

GF91672139

Titanium, wire reel, 20m, diameter 0.05mm, hard, 99.8%

GF56868766

Titanium, wire reel, 25m, diameter 1.0mm, annealed, 99.6+%

GF43519945

Titanium, wire reel, 2m, diameter 1.0mm, as drawn, 99.99+%

GF91204466

Titanium, wire reel, 5m, diameter 1.0mm, as drawn, 99.6+%

GF96391402

Titanium, wire reel, 25m, diameter 0.20mm, annealed, 99.6+%

GF90688449

Titanium, wire reel, 5m, diameter 0.75mm, as drawn, 99.6+%

GF43403431

Titanium, wire reel, 500m, diameter 0.20mm, annealed, 99.6+%

GF24976525

Titanium, rod, 200mm, diameter 25mm, annealed, 99.6+%

GF52005596

Titanium, tube, 500mm, outside diameter 9.5mm, inside diameter 8.2mm, wall thickness 0.65mm, annealed, 99.6+%

GF90731505

Titanium, tube, 500mm, outside diameter 0.51mm, inside diameter 0.35mm, wall thickness 0.08mm, annealed, 99.6+%

GF29584187

Titanium, tube, 500mm, outside diameter 2.03mm, inside diameter 1.55mm, wall thickness 0.24mm, annealed, 99.6+%

GF95731960

Titanium, tube, 500mm, outside diameter 3.0mm, inside diameter 1.5mm, wall thickness 0.75mm, annealed, 99.6+%

GF71020235

Titanium, wire reel, 0.5m, diameter 1.0mm, as drawn, 99.6+%

GF62738006

Titanium, tube, 500mm, outside diameter 0.81mm, inside diameter 0.61mm, wall thickness 0.1mm, as drawn, 99.6+%