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Tris(dimethylamino)silane packaged for use in deposition systems

Tris(dimethylamino)silane

Tris(dimethylamino)silane packaged for use in deposition systems
동의어:
Tris(dimethylamino)silane, (Me2N)3SiH, N,N,N′,N′,N′′,N′′-Hexamethylsilanetriamine, TDMAS, Tris(dimethylamido)silane
Linear Formula:
((CH3)2N)3SiH
CAS Number:
Molecular Weight:
161.32
EC 번호:

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