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463043

Sigma-Aldrich

Disilane

electronic grade

Sinonimo/i:

Disilicane, Disilicoethane, Disilicon hexahydride, Silicoethane, Silicon hydride (Si2 H6 )

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About This Item

Formula condensata:
Si2H6
Numero CAS:
1590-87-0
Peso molecolare:
62.22
Numero CE:
216-466-5
Numero MDL:
MFCD00054678
Codice UNSPSC:
12352103
ID PubChem:
24869889
NACRES:
NA.23

Grado

electronic grade

Saggio

≥99.998% chemical purity basis

Forma fisica

gas

Impurezze

≤50 ppm Higher silanes
<0.2 ppm Chlorosilanes
<1 ppm Argon (Ar) + Oxygen (O2)
<1 ppm Carbon dioxide (CO2)
<1 ppm Nitrogen (N2)
<1 ppm THC
<1 ppm Water
<5 ppm Siloxanes

P. eboll.

−14.5 °C (lit.)

Punto di fusione

−132.6 °C (lit.)

Temp. transizione

critical temperature 150.9 °C

Stringa SMILE

[SiH3][SiH3]

InChI

1S/H6Si2/c1-2/h1-2H3
PZPGRFITIJYNEJ-UHFFFAOYSA-N

Categorie correlate

Descrizione generale

Atomic number of base material: 14 Silicon

Applicazioni

Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.

Caratteristiche e vantaggi

Disilane is used for the deposition of amorphous silicon, epitaxial silicon and silicon based dielectrics via rapid low-temperature chemical vapor depsition (LTCVD). Disilane is also used in the epitaxial growth of SiGe films by molecular beam epitaxy (MBE) in conjunction with solid sources of germanium. Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.

Avvertenze

Danger

Indicazioni di pericolo

H221,H280,H312,H315,H319,H334,H335

Classi di pericolo

Acute Tox. 4 Dermal - Eye Irrit. 2 - Flam. Gas 1B - Press. Gas Liquefied gas - Resp. Sens. 1 - Skin Irrit. 2 - STOT SE 3

Organi bersaglio

Respiratory system

Codice della classe di stoccaggio

2A - Gases

Classe di pericolosità dell'acqua (WGK)

WGK 3

Punto d’infiammabilità (°F)

<50.0 °F - closed cup

Punto d’infiammabilità (°C)

< 10 °C - closed cup

Dispositivi di protezione individuale

Eyeshields, Faceshields, Gloves, multi-purpose combination respirator cartridge (US)

Certificati d'analisi (COA)

Cerca il Certificati d'analisi (COA) digitando il numero di lotto/batch corrispondente. I numeri di lotto o di batch sono stampati sull'etichetta dei prodotti dopo la parola ‘Lotto’ o ‘Batch’.

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