Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Journal of nanoscience and nanotechnology (2014-04-18)

Shaoming Yang, Xiuqin Chen, Kazuo Yamamoto, Masanori Iitake, D Nishio-Hamane, Hideki Sakai, Masahiko Abe

ZUSAMMENFASSUNG

The structural and functional characterizations of titanium nitride (TiN) advanced ceramic microsprings (CMSs), with a coil diameter of several micrometers and synthesized by chemical vapor deposition (CVD) were investigated by microscopy techniques. The CMSs were sufficiently mechanically elastic for extension to more than 1.3 times their original size, and they spontaneously contracted to their original state on releasing the tension. To explore their application to a microdevice, a method of manufacturing TiN-CMS microcircuit elements was developed. The I-V plots of the elements indicated that the CMSs were as conductive as metals.

MATERIALIEN

Produktnummer

Marke

Produktbeschreibung

348791

Sigma-Aldrich

Titan, foil, thickness 0.127 mm, 99.7% trace metals basis

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Titan, powder, <45 μm avg. part. size, 99.98% trace metals basis

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Titannitrid, <3 μm

267503

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Titan, foil, thickness 0.25 mm, 99.7% trace metals basis

268496

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Titan, powder, −100 mesh, 99.7% trace metals basis

460400

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Titan, wire, diam. 0.25 mm, 99.7% trace metals basis

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Titan, mesh, 100x100mm, nominal aperture 0.19mm, wire diameter 0.23mm, 60x60 wires/inch, open area 20%, twill weave

348848

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Titan, foil, thickness 0.127 mm, ≥99.99% trace metals basis

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