Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Electrically conductive and mechanically elastic titanium nitride ceramic microsprings.

Journal of nanoscience and nanotechnology (2014-04-18)

Shaoming Yang, Xiuqin Chen, Kazuo Yamamoto, Masanori Iitake, D Nishio-Hamane, Hideki Sakai, Masahiko Abe

ZUSAMMENFASSUNG

The structural and functional characterizations of titanium nitride (TiN) advanced ceramic microsprings (CMSs), with a coil diameter of several micrometers and synthesized by chemical vapor deposition (CVD) were investigated by microscopy techniques. The CMSs were sufficiently mechanically elastic for extension to more than 1.3 times their original size, and they spontaneously contracted to their original state on releasing the tension. To explore their application to a microdevice, a method of manufacturing TiN-CMS microcircuit elements was developed. The I-V plots of the elements indicated that the CMSs were as conductive as metals.

MATERIALIEN

Produktnummer

Marke

Produktbeschreibung

366994

Sigma-Aldrich

Titan, powder, <45 μm avg. part. size, 99.98% trace metals basis

348791

Sigma-Aldrich

Titan, foil, thickness 0.127 mm, 99.7% trace metals basis

595063

Sigma-Aldrich

Titannitrid, <3 μm

267503

Sigma-Aldrich

Titan, foil, thickness 0.25 mm, 99.7% trace metals basis

268496

Sigma-Aldrich

Titan, powder, −100 mesh, 99.7% trace metals basis

460400

Sigma-Aldrich

Titan, wire, diam. 0.25 mm, 99.7% trace metals basis

268526

Sigma-Aldrich

Titan, sponge, 3-19 mm, 99.5% trace metals basis

369489

Sigma-Aldrich

Titan, foil, thickness 2.0 mm, 99.7% trace metals basis

348848

Sigma-Aldrich

Titan, foil, thickness 0.025 mm, 99.98% trace metals basis

348805

Sigma-Aldrich

Titan, foil, thickness 0.5 mm, 99.99% trace metals basis

767506

Sigma-Aldrich

Titan, sputtering target, diam. × thickness 2.00 in. × 0.25 in., 99.995% trace metals basis

GF16031843

Titan, mesh, 100x100mm, nominal aperture 0.19mm, wire diameter 0.23mm, 60x60 wires/inch, open area 20%, twill weave

GF29374005

Titan, mesh, 100x100mm, nominal aperture 4.3mm, wire diameter 1.5mm, 4.4x4.4 wires/inch, open area 94%, platinized diamond mesh

266035

Sigma-Aldrich

Titan, wire, diam. 1.0 mm, 99.99% trace metals basis

305812

Sigma-Aldrich

Titan, 5-10 mm, ≥99.99% trace metals basis (purity exclusive of Na and K content)

460397

Sigma-Aldrich

Titan, foil, thickness 0.127 mm, ≥99.99% trace metals basis

267481

Sigma-Aldrich

Titan, foil, thickness 0.25 mm, 99.99% trace metals basis

267902

Sigma-Aldrich

Titan, wire, diam. 0.81 mm, 99.7% trace metals basis

348864

Sigma-Aldrich

Titan, wire, diam. 0.5 mm, 99.99% trace metals basis

GF31127712

Titan, rod, 10mm, diameter 50mm, 99.99+%

GF14990935

Titan, tube, 1000mm, outside diameter 10.3mm, inside diameter 8.7mm, wall thickness 0.8mm, annealed, 99.6+%

GF46592949

Titan, wire, straight, 1000mm, diameter 1.0mm, as drawn, 99.6+%

GF49264713

Titan, tube, 200mm, outside diameter 1.6mm, inside diameter 1.2mm, wall thickness 0.2mm, hard, 99.6+%

433667

Sigma-Aldrich

Titan, evaporation slug, diam. × L 6.3 mm × 6.3 mm, ≥99.99% trace metals basis

GF86399106

Titan, tube, 500mm, outside diameter 1.6mm, inside diameter 1.2mm, wall thickness 0.2mm, hard, 99.6+%

GF62977540

Titan, tube, 200mm, outside diameter 2.03mm, inside diameter 1.63mm, wall thickness 0.2mm, annealed, 99.6+%

GF13900205

Titan, tube, 100mm, outside diameter 0.51mm, inside diameter 0.35mm, wall thickness 0.08mm, annealed, 99.6+%

GF90963928

Titan, rod, 25mm, diameter 50mm, 99.99+%

GF95731960

Titan, tube, 500mm, outside diameter 3.0mm, inside diameter 1.5mm, wall thickness 0.75mm, annealed, 99.6+%

GF96834493

Titan, rod, 1000mm, diameter 5mm, annealed, 99.6+%