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Sigma-Aldrich

Disilan

electronic grade

Synonym(e):

Disilicane, Disilicoethane, Disilicon hexahydride, Silicoethane, Silicon hydride (Si2 H6 )

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About This Item

Lineare Formel:
Si2H6
CAS-Nummer:
1590-87-0
Molekulargewicht:
62.22
EG-Nummer:
216-466-5
MDL-Nummer:
MFCD00054678
UNSPSC-Code:
12352103
PubChem Substanz-ID:
24869889
NACRES:
NA.23

Qualität

electronic grade

Assay

≥99.998% chemical purity basis

Form

gas

Verunreinigungen

≤50 ppm Higher silanes
<0.2 ppm Chlorosilanes
<1 ppm Argon (Ar) + Oxygen (O2)
<1 ppm Carbon dioxide (CO2)
<1 ppm Nitrogen (N2)
<1 ppm THC
<1 ppm Water
<5 ppm Siloxanes

bp

−14.5 °C (lit.)

mp (Schmelzpunkt)

−132.6 °C (lit.)

Übergangstemp.

critical temperature 150.9 °C

SMILES String

[SiH3][SiH3]

InChI

1S/H6Si2/c1-2/h1-2H3

InChIKey

PZPGRFITIJYNEJ-UHFFFAOYSA-N

Verwandte Kategorien

Allgemeine Beschreibung

Atomic number of base material: 14 Silicon

Anwendung

Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.

Leistungsmerkmale und Vorteile

Disilane is used for the deposition of amorphous silicon, epitaxial silicon and silicon based dielectrics via rapid low-temperature chemical vapor depsition (LTCVD). Disilane is also used in the epitaxial growth of SiGe films by molecular beam epitaxy (MBE) in conjunction with solid sources of germanium. Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.

Signalwort

Danger

Gefahreneinstufungen

Acute Tox. 4 Dermal - Eye Irrit. 2 - Flam. Gas 1B - Press. Gas Liquefied gas - Resp. Sens. 1 - Skin Irrit. 2 - STOT SE 3

Zielorgane

Respiratory system

Lagerklassenschlüssel

2A - Gases

WGK

WGK 3

Flammpunkt (°F)

<50.0 °F - closed cup

Flammpunkt (°C)

< 10 °C - closed cup

Persönliche Schutzausrüstung

Eyeshields, Faceshields, Gloves, multi-purpose combination respirator cartridge (US)

Analysenzertifikate (COA)

Suchen Sie nach Analysenzertifikate (COA), indem Sie die Lot-/Chargennummer des Produkts eingeben. Lot- und Chargennummern sind auf dem Produktetikett hinter den Wörtern ‘Lot’ oder ‘Batch’ (Lot oder Charge) zu finden.

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Die Dokumentenbibliothek aufrufen

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